Dr. Feng Wang Profile

Dr. Feng Wang

at Globalfoundries Inc

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Author

Publications (2)

Proceedings Article | 20 March 2019 Presentation + Paper

Machine learning based wafer defect detection

Yuansheng Ma, Feng Wang, Qian Xie, Le Hong, Joerg Mellmann, Yuyang Sun, Shao Wen Gao, Sonal Singh, Panneerselvam Venkatachalam, James Word

Proceedings Volume 10962, 1096208 (2019) https://doi.org/10.1117/12.2513232

KEYWORDS: Data modeling, Machine learning, Semiconducting wafers, Defect detection, Statistical modeling, Optics manufacturing, Optical proximity correction, Wafer-level optics, Feature extraction, High volume manufacturing

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Proceedings Article | 16 October 2017 Paper

Aerial image ORC checks and their correlation to wafer-edge yield limitation for metals: a study and an OPC resolution

Tamer Desouky, Yixiao Zhang, Mark Terry, Haizhou Yin, Muhammed Pallachali, Nicolai Petrov, Teck Jung Tang, Fadi Batarseh, Ahmed Khalil, Pietro Babighian, Rohan Deshpande, Deborah Ryan, Rao Desineni, Shweta Shokale, Feng Wang, Sang-Kee Eah, Jiechang Hou

Proceedings Volume 10451, 104511L (2017) https://doi.org/10.1117/12.2280568

KEYWORDS: Optical proximity correction, Semiconducting wafers, Silicon, Metals, Design for manufacturing, Scanning electron microscopy, Lithography

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