Feng Xu
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
KEYWORDS: Wafer-level optics, Lithography, Photoelasticity, Modulation, Polarization, Image processing, Image filtering, Semiconducting wafers, Signal detection, Projection lithography

SPIE Journal Paper | August 1, 2011
OE Vol. 50 Issue 08
KEYWORDS: Fringe analysis, Fourier transforms, Optical alignment, Semiconducting wafers, Photomasks, Nanolithography, Linear filtering, Error analysis, Lithography, Numerical simulations

PROCEEDINGS ARTICLE | October 22, 2010
Proc. SPIE. 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Fringe analysis, Wavelets, Fourier transforms, Phase shift keying, Demodulation, Photomasks, Optical alignment, Semiconducting wafers, Nanolithography

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