Feng Zhu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 November 2012
Proc. SPIE. 8556, Holography, Diffractive Optics, and Applications V
KEYWORDS: Actuators, Chromatic aberrations, Lithography, Microscopes, Ferroelectric materials, Sensors, Calibration, Objectives, Laser systems engineering, Multiphoton lithography

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