Fengyuan Yu
at Changchun Univ of Science and Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 August 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Microelectromechanical systems, Scattering, Etching, Electrodes, Microchannel plates, Silicon, Diffusion, Photomicroscopy, Semiconducting wafers, Temperature metrology

Proceedings Article | 16 August 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Microsystems, Etching, Microchannel plates, Crystals, Silicon, Scanning electron microscopy, Semiconducting wafers, Anisotropic etching, Electrochemical etching, Temperature metrology

Proceedings Article | 16 August 2013
Proc. SPIE. 8912, International Symposium on Photoelectronic Detection and Imaging 2013: Low-Light-Level Technology and Applications
KEYWORDS: Silica, Etching, Microchannel plates, Interfaces, Ions, Silicon, Hydrogen, Silicon photomultipliers, Electrochemical etching, High aspect ratio silicon micromachining

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