Mr. Filippo Belletti Profile

Filippo Belletti

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 20 March 2020 Paper

Enabling accurate and robust optical metrology of in device overlay

Min-Seok Kang, Chan Hwang, Seungyoon Lee, Jeongjin Lee, Joon-Soo Park, Christian Leewis, Eun-Ji Yang, Do-Haeng Lee, James Lee, Sabil Huda, Noh-Kyoung Park, Anagnostis Tsiatmas, Giulio Bottegal, Amy Wang, Filippo Belletti, Jan Jitse Venselaar, Giacomo Miceli, Izabela Saj, Sam Chen

Proceedings Volume 11325, 1132529 (2020) https://doi.org/10.1117/12.2553446

KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Measurement devices, Optical metrology, Etching, Scanners, Diffractive optical elements, Wafer testing, Optical testing

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Proceedings Article | 28 March 2017 Presentation + Paper

High-NA optical CD metrology on small in-cell targets enabling improved higher order dose control and process control for logic

Hugo Cramer, Elliott Mc Namara, Rik van Laarhoven, Ram Jaganatharaja, Isabel de la Fuente, Sharon Hsu, Filippo Belletti, Milos Popadic, Ward Tu, Wade Huang

Proceedings Volume 10145, 101451B (2017) https://doi.org/10.1117/12.2260268

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Process control, Logic, Etching, Metrology, Scanners, Manufacturing, Wafer testing, Reticles

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