CONFERENCE PROCEEDINGS
Advanced Search
Fiona Leung
at KLA Singapore
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 20 March 2020 Paper
Machine learning for Tool Induced Shift (TIS) reduction
Shlomit Katz, Boaz Ophir, Udi Shusterman, Anna Golotsvan, Liran Yerushalmi, Efi Megged, Yoav Grauer, Jian Zhang, Alimei Shih, Shi-Ming Wei, Judith Yep, Fiona (Shuk Fan) Leung, Pek Beng Ong
Proceedings Volume 11325, 113252C (2020) https://doi.org/10.1117/12.2550747
KEYWORDS: Semiconducting wafers, Overlay metrology, Machine learning, Metrology, Data modeling, 3D modeling, Performance modeling
Proceedings Article | 20 March 2020 Paper
OPO residuals improvement with imaging metrology for 3D NAND
Shlomit Katz, Anna Golotsvan, Yoav Grauer, Efi Megged, Greg Gray, Fiona (Shuk Fan) Leung, Pek Beng Ong, Shi Lei, Jeremy (Shi-Ming) Wei, Wayne (Wei) Zhou, Linfei Gao
Proceedings Volume 11325, 113252J (2020) https://doi.org/10.1117/12.2551874
KEYWORDS: Overlay metrology, Semiconducting wafers, 3D acquisition, 3D image processing, Imaging metrology, Scanning electron microscopy, Optimization (mathematics), Photovoltaics
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top