Florian Knorr
Engineer at Physikalisch Technische Bundesanstalt
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Optical filters, Mirrors, Metrology, Lifetime testing equipment, Spatial filters, Sensors, Pellicles, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Radiometry, Protactinium

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