Dr. Florian Letzkus
at Institut für Mikroelektronik Stuttgart
SPIE Involvement:
Author
Publications (39)

Proceedings Article | 20 August 2020 Presentation
Proc. SPIE. 11476, Organic and Hybrid Field-Effect Transistors XIX
KEYWORDS: Thin films, Lithography, Silicon, Resistance, Photomasks, Transistors, Network security

Proceedings Article | 2 June 2017 Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Refractive index, Visible radiation, Electrodes, Polymers, Metals, Silicon, Silver, Coating, Manufacturing, Chemical vapor deposition, Platinum, Printing, Ion implantation, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Deposition processes, Semiconducting wafers, Radiation thermography

Proceedings Article | 13 May 2016 Presentation + Paper
Proc. SPIE. 9891, Silicon Photonics and Photonic Integrated Circuits V
KEYWORDS: Optical design, Waveguides, Modulators, Multiplexers

Proceedings Article | 5 October 2015 Presentation
Proc. SPIE. 9569, Printed Memory and Circuits
KEYWORDS: Thin films, Optical lithography, Oscillators, Switching, Electrodes, Silicon, Photomasks, Transistors, Integrated circuits, Organic semiconductors

Proceedings Article | 14 October 2011 Paper
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Gold, Electron beam lithography, Etching, Metals, Silicon, Scanning electron microscopy, Photomasks, Aluminum, Transistors, Semiconducting wafers

Showing 5 of 39 publications
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