Florian Oesterle
at Friedrich-Alexander-Univ Erlangen-Nürnberg
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Thin films, Electrodes, Silicon, Manufacturing, Computer simulations, Capacitance, Fermium, Free electron lasers, Americium

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