Foster Huang
at Nanya Technology Corp
SPIE Involvement:
Publications (7)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295530 (2024)
KEYWORDS: Metrology, Overlay metrology, Inspection, Design, Optical parametric oscillators, Design rules, Semiconducting wafers, Scanners, Etching, Diffractive optical elements

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129551A (2024)
KEYWORDS: Line width roughness, Metrology, Critical dimension metrology, Stochastic processes, Semiconducting wafers, Defect inspection, Measurement uncertainty, Calibration, High volume manufacturing

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552D (2024)
KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

Proceedings Article | 26 May 2022 Presentation + Paper
Tsewen Huang, Shueming Chen, Kevin Hsiao, Steve Lin, Ray Fei, Yufei Duan, Kevin Gao, Luke Lin, Selena Chen
Proceedings Volume 12053, 120530J (2022)
KEYWORDS: Defect detection, Inspection, Transmission electron microscopy, Signal detection, Sensors, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Data storage

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Tsu-Wen Huang, Ying-Cheng Chuang, Hsuan-Jui Huang, Chung-Chang Liu, Hsiao-Lun Chu, Sheng-Yu Chen, Ming-Ju Li, Jun-Eu Tang, Chiou-Shoei Chee, Choon-Wai Chang, Tung-Ying Lee
Proceedings Volume 11611, 1161139 (2021)

Showing 5 of 7 publications
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