Dr. France Le Bihan
at Univ de Rennes I
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Etching, Electrodes, Germanium, Ions, Silicon, Bridges, Photomasks, Boron, Low pressure chemical vapor deposition, Field effect transistors

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Thin films, Sensors, Glasses, Germanium, Silicon, Silicon films, Humidity, Bridges, Transistors, Field effect transistors

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