Dr. Francesca Campabadal
at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Oxides, Nanostructures, Electron beam lithography, Electron beams, Metals, Scanning electron microscopy, Transistors, CMOS technology, Nanoelectromechanical systems, Nanolithography

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Oxides, Sensors, Etching, Silicon, Photomasks, Aluminum, Semiconducting wafers, Nanoelectromechanical systems, Nanofabrication, Nanolithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top