Dr. Francesco Flora
at ENEA
SPIE Involvement:
Author
Publications (48)

Proceedings Article | 3 January 2019
Proc. SPIE. 11042, XXII International Symposium on High Power Laser Systems and Applications
KEYWORDS: Lithography, Optical lithography, Graphene, Silicon, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Plasma

Proceedings Article | 30 January 2013
Proc. SPIE. 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012
KEYWORDS: Microscopes, Patents, Ultraviolet radiation, Luminescence, Laser induced fluorescence, Photomasks, Extreme ultraviolet, Transistors, Extreme ultraviolet lithography, Adhesives

Proceedings Article | 22 April 2009
Proc. SPIE. 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Optical filters, Mirrors, X-ray sources, Plasmas, Laser development, Projection systems, Photomasks, Extreme ultraviolet, Krypton, Projection lithography

Proceedings Article | 2 October 2007
Proc. SPIE. 6703, Ultrafast X-Ray Sources and Detectors
KEYWORDS: Mirrors, Fluctuations and noise, Argon, Glasses, Copper, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Krypton, Plasma

Proceedings Article | 12 June 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Confocal microscopy, Thin films, Luminescence, Crystals, X-rays, Silicon, Laser induced fluorescence, Silicon films, Extreme ultraviolet, Spatial resolution

Showing 5 of 48 publications
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