Dr. Franck Alexis Chollet
at Univ de Franche-Comte
SPIE Involvement:
Conference Program Committee | Author
Publications (12)

PROCEEDINGS ARTICLE | December 20, 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Gold, Lithography, Optical lithography, Etching, Printing, Photoresist materials, Photomasks, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | December 20, 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Fabrication, Lithography, Nanostructures, Optical spheres, Polymethylmethacrylate, Sputter deposition, Metals, Silicon, Coating, Nanolithography

PROCEEDINGS ARTICLE | January 19, 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Optical fibers, Microfluidics, Polymethylmethacrylate, Sensors, Polymers, Semiconductor lasers, CCD cameras, Diodes, Signal detection, Liquids

PROCEEDINGS ARTICLE | December 29, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Optical fibers, Lenses, Etching, Polymers, Silicon, Photoresist materials, Microlens, Deep reactive ion etching, Spherical lenses, Semiconducting wafers

PROCEEDINGS ARTICLE | December 29, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Optical fibers, Near infrared, Visible radiation, Indium gallium arsenide, Etching, Silicon, Lamps, Photodiodes, Semiconducting wafers, Absorption

SPIE Journal Paper | December 1, 2001
OE Vol. 40 Issue 12
KEYWORDS: Birefringence, Optical filters, Transmittance, Waveguides, Crystals, Linear filtering, Titanium, Tunable filters, Polarization, Electro optics

Showing 5 of 12 publications
Conference Committee Involvement (3)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
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