Dr. François Weisbuch
at GLOBALFOUNDRIES Dresden Module Two GmbH
SPIE Involvement:
Publications (27)

Proceedings Article | 5 October 2023 Paper
Proceedings Volume 12802, 1280207 (2023) https://doi.org/10.1117/12.2675601
KEYWORDS: Matrices, Design and modelling, Lithography, Design rules, Feature extraction, Etching, Optical lithography, Optical proximity correction, Evolutionary optimization, Binary data

Proceedings Article | 14 June 2022 Poster + Paper
Proceedings Volume PC12053, PC120530Q (2022) https://doi.org/10.1117/12.2614732
KEYWORDS: SRAF, Printing, Scanning electron microscopy, Calibration, Data modeling, Computer simulations, Artificial intelligence, Optical proximity correction, Image analysis, Stochastic processes

Proceedings Article | 9 March 2021 Presentation + Paper
Proceedings Volume 11611, 116110Y (2021) https://doi.org/10.1117/12.2583715

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11613, 116130G (2021) https://doi.org/10.1117/12.2584714
KEYWORDS: Calibration, Data modeling, Resolution enhancement technologies, Process modeling, Scanning electron microscopy, Data acquisition, Optical lithography, Metrology, Lithography, Computer simulations

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11327, 113270D (2020) https://doi.org/10.1117/12.2552048
KEYWORDS: Photomasks, Calibration, Etching, Scanners, Lithography, SRAF, Scanning electron microscopy, Semiconducting wafers, Metrology, Optical lithography

Showing 5 of 27 publications
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