Dr. Frank E. Abboud
Vice President, General Manager at Intel Corp
SPIE Involvement:
Scholarship Committee | Conference Program Committee | Author | Editor | Science Fair Judge
Publications (32)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Lithography, Optical lithography, Electrodes, Manufacturing, Printing, Photomasks, Extreme ultraviolet, Raster graphics, Overlay metrology, Vestigial sideband modulation

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Defect detection, Deep ultraviolet, Inspection, Optical inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

Proceedings Article | 21 October 2014 Paper
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Electron beam lithography, Diffusion, Monte Carlo methods, Data processing, Photomasks, Optical proximity correction, Raster graphics, Computer aided design, Semiconducting wafers, Vestigial sideband modulation

SPIE Journal Paper | 25 June 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Process modeling, Instrument modeling, Reflectivity, Defect inspection, Inspection, Mask making, Printing

Proceedings Article | 8 November 2012 Paper
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Signal to noise ratio, Lithography, Electron beam lithography, Electrons, Photomasks, Beam shaping, Optical proximity correction, Raster graphics, Photomask technology, Vestigial sideband modulation

Showing 5 of 32 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 14 November 2012

SPIE Conference Volume | 13 October 2011

SPIE Conference Volume | 30 December 1999

SPIE Conference Volume | 18 December 1998

Conference Committee Involvement (19)
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Photomask Technology
12 September 2016 | San Jose, California, United States
Showing 5 of 19 Conference Committees
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