Mr. Frank Eggenstein
at Helmholtz-Zentrum Berlin
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Carbon, Optical components, X-ray optics, Metrology, Contamination, X-rays, Reflectivity, Reflectometry, Synchrotron radiation, Scanning tunneling microscopy

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Optical components, Mirrors, Metrology, Sensors, Reflectivity, Reflectometry, Collimation, Extreme ultraviolet, Monochromators, Diffraction gratings

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Optical components, Mirrors, Metrology, LabVIEW, Polarization, Sensors, Reflectivity, Reflectometry, Extreme ultraviolet, Monochromators

PROCEEDINGS ARTICLE | November 3, 1997
Proc. SPIE. 3150, Gratings and Grating Monochromators for Synchrotron Radiation
KEYWORDS: Energy efficiency, Diffraction, Optical design, Data modeling, Phase modulation, Sensors, Transmittance, Synchrotron radiation, Monochromators, Diffraction gratings

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