Mr. Frank Eggenstein
at Helmholtz-Zentrum Berlin
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Carbon, Metrology, X-rays, X-ray optics, Optical components, Contamination, Reflectometry, Synchrotron radiation, Scanning tunneling microscopy, Reflectivity

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Mirrors, Reflectometry, Monochromators, Metrology, Sensors, Extreme ultraviolet, Diffraction gratings, Reflectivity, Optical components, Collimation

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Reflectometry, Mirrors, Sensors, Polarization, Extreme ultraviolet, Monochromators, Metrology, Optical components, LabVIEW, Reflectivity

PROCEEDINGS ARTICLE | November 3, 1997
Proc. SPIE. 3150, Gratings and Grating Monochromators for Synchrotron Radiation
KEYWORDS: Monochromators, Diffraction gratings, Diffraction, Synchrotron radiation, Energy efficiency, Sensors, Phase modulation, Transmittance, Optical design, Data modeling

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