Dr. Frank Frost
at Leibniz-Institut fuer Oberflaechenmodifizierung eV
SPIE Involvement:
Publications (8)

SPIE Journal Paper | 24 May 2019
OE Vol. 58 Issue 09
KEYWORDS: Etching, Diffraction gratings, Ions, Diffraction, Ion beams, Reactive ion etching, Refractive index, Photoresist materials, Silica, Oxygen

SPIE Journal Paper | 20 May 2019
OE Vol. 58 Issue 09
KEYWORDS: Ion beams, Aluminum, Etching, Polymers, Ions, Polymer thin films, Surface finishing, Metal optics, Surface roughness, Mirrors

Proceedings Article | 26 April 2019
Proc. SPIE. 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI
KEYWORDS: Spatial frequencies, Etching, Ions, Surface roughness, Oxygen, Ion beams, Aluminum, Optics manufacturing

Proceedings Article | 3 October 2016
Proc. SPIE. 9929, Nanostructured Thin Films IX
KEYWORDS: Nanostructures, Iron, Sputter deposition, Particles, Noble gases, Ions, Silicon, Atomic force microscopy, Ion beams, Nanorods

Proceedings Article | 27 August 2015
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Polishing, Silica, Calibration, Etching, Silicon, Surface roughness, Atomic force microscopy, Ion beams, Measurement devices, Reactive ion etching

Showing 5 of 8 publications
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