Dr. Frank E. Gennari
Senior Member of Consulting Staff at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 4 April 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Convolutional neural networks, Metals, Neural networks, Design for manufacturing, Machine learning, Semiconductor manufacturing, Artificial intelligence, Charge-coupled devices, Convolution, Model-based design

Proceedings Article | 18 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Silicon, Inspection, Diagnostics, Feature extraction, Machine learning, High volume manufacturing, Failure analysis

Proceedings Article | 10 April 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Data modeling, Manufacturing, Feature extraction, Design for manufacturing, Machine learning, Testing and analysis, Model-based design

Proceedings Article | 30 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Analytics, Logic, Optical lithography, Statistical analysis, Databases, Metals, Silicon, Manufacturing, Computer simulations, Design for manufacturing, Charge-coupled devices, Optical proximity correction, Digital electronics, Product engineering, Yield improvement, Model-based design, Process modeling, Design for manufacturability

Showing 5 of 18 publications
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