Dr. Frank E. Gennari
Senior Member of Consulting Staff at Cadence Design Systems Inc
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Convolutional neural networks, Metals, Neural networks, Design for manufacturing, Machine learning, Semiconductor manufacturing, Artificial intelligence, Charge-coupled devices, Convolution, Model-based design

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Silicon, Inspection, Diagnostics, Feature extraction, Machine learning, High volume manufacturing, Failure analysis

Proceedings Article | 10 April 2018 Presentation + Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Data modeling, Manufacturing, Feature extraction, Design for manufacturing, Machine learning, Testing and analysis, Model-based design

Showing 5 of 19 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top