Frank T. Hartley
Sr. Technical Staff at Jet Propulsion Lab
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 3 November 2003
Proc. SPIE. 5173, Current Developments in Lens Design and Optical Engineering IV
KEYWORDS: Fabrication, Holography, X-rays, Coating, Wavefronts, Photomasks, Mask making, X-ray lithography, Spectrometer engineering, Diffraction gratings

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Statistical analysis, Spectroscopy, Molecules, Spectrometers, Ions, Mass spectrometry, Ionization, Chemical analysis, Mars, Carbon monoxide

Proceedings Article | 1 September 2000
Proc. SPIE. 4075, Micro-Opto-Electro-Mechanical Systems
KEYWORDS: Gold, Optical components, Lithography, Etching, Ions, Ion beams, Micromachining, Zone plates, X-ray lithography, Optics manufacturing

Proceedings Article | 21 July 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Gold, Lithography, Electron beam lithography, Etching, Metals, X-rays, Ion beams, Iodine, Micromachining, Zone plates

Proceedings Article | 8 October 1999
Proc. SPIE. 3893, Design, Characterization, and Packaging for MEMS and Microelectronics
KEYWORDS: Gold, Lithography, Optical lithography, Ultraviolet radiation, X-rays, Printing, Photoresist materials, Ion beams, Photomasks, X-ray lithography

Showing 5 of 9 publications
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