Frank Hertlein
at Incoatec GmbH
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10387, Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI
KEYWORDS: Analytics, Diffraction, Mirrors, Electron beams, X-ray optics, Crystals, X-rays, X-ray diffraction, X-ray sources, Single crystal X-ray diffraction

PROCEEDINGS ARTICLE | September 9, 2009
Proc. SPIE. 7448, Advances in X-Ray/EUV Optics and Components IV
KEYWORDS: Wafer-level optics, Multilayers, X-ray optics, Capillaries, X-rays, X-ray sources, Reflectometry, Beam shaping, Free electron lasers, Optics manufacturing

PROCEEDINGS ARTICLE | September 3, 2008
Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III
KEYWORDS: Carbon, Mirrors, Multilayers, Light sources, X-ray optics, Sputter deposition, X-rays, Optical coatings, Reflectivity, Synchrotrons

PROCEEDINGS ARTICLE | May 18, 2007
Proc. SPIE. 6586, Damage to VUV, EUV, and X-ray Optics
KEYWORDS: Carbon, Mirrors, Multilayers, X-ray optics, Reflection, Coating, Reflectivity, Synchrotrons, Free electron lasers, Optics manufacturing

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