Prof. Frank Niklaus
Research Associate at KTH Royal Institute of Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (11)

PROCEEDINGS ARTICLE | February 22, 2018
Proc. SPIE. 10537, Silicon Photonics XIII
KEYWORDS: Microelectromechanical systems, Resonators, Waveguides, Dispersion, Etching, Dry etching, Silicon, Integrated optics, Tunable filters, Silicon photonics

PROCEEDINGS ARTICLE | May 21, 2011
Proc. SPIE. 8012, Infrared Technology and Applications XXXVII
KEYWORDS: Bolometers, Reflectors, Quantum wells, Sensors, Silicon, Resistance, Infrared radiation, Semiconducting wafers, Wafer bonding, Absorption

PROCEEDINGS ARTICLE | May 14, 2010
Proc. SPIE. 7726, Optical Sensing and Detection
KEYWORDS: Bolometers, Microelectromechanical systems, Readout integrated circuits, Infrared bolometers, Quantum wells, Germanium, Copper, Semiconducting wafers, Wafer bonding, Tin

PROCEEDINGS ARTICLE | May 7, 2009
Proc. SPIE. 7298, Infrared Technology and Applications XXXV
KEYWORDS: Staring arrays, Bolometers, Readout integrated circuits, Infrared cameras, Infrared bolometers, Thermography, Infrared sensors, Infrared imaging, Sensors, Infrared radiation

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Metals, Silicon, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Staring arrays, Bolometers, Readout integrated circuits, Infrared bolometers, Infrared imaging, Silicon, Resistance, Infrared radiation, Semiconducting wafers, Wafer bonding

Showing 5 of 11 publications
Conference Committee Involvement (1)
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
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