CONFERENCE PROCEEDINGS
Advanced Search
Frank R. Nowak
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 28 May 2004 Paper
Implementation of pattern-specific illumination pupil optimization on Step & Scan systems
Andre Engelen, Robert Socha, Eric Hendrickx, Wieger Scheepers, Frank Nowak, Marco Van Dam, Armin Liebchen, Denis Faas
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.544240
KEYWORDS: Diffractive optical elements, Zoom lenses, Imaging systems, Fiber optic illuminators, Axicons, Photomasks, Manufacturing, Scanning electron microscopy, Critical dimension metrology, Optimization (mathematics)
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top