Frank R. Nowak
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Axicons, Diffractive optical elements, Imaging systems, Manufacturing, Scanning electron microscopy, Photomasks, Zoom lenses, Critical dimension metrology, Optimization (mathematics), Fiber optic illuminators

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