Prof. Frank L. Palmieri
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | April 20, 2016
Proc. SPIE. 9803, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2016
KEYWORDS: Actuators, Optical amplifiers, Aerospace engineering, Mechanics, Sensors, Calibration, Electrodes, Crystals, Solids, Aerodynamics, Sensor calibration, Direct methods, Wind measurement, Systems modeling, Piezoelectric effects, Electromechanical design

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Quartz, Metals, Ultraviolet radiation, Manufacturing, Chromium, Photomasks, Nanoimprint lithography

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Dielectrics, Chemistry, Resistance, Critical dimension metrology, Reactive ion etching, Back end of line

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Annealing, Molecules, Dielectrics, Silicon, Chlorine, Bromine, Back end of line, Front end of line

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Diamond, Optical lithography, Etching, Copper, Dielectrics, Silicon, Scanning electron microscopy, Liquids, Back end of line

PROCEEDINGS ARTICLE | March 27, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Thin films, Lithography, Safety, Etching, Capillaries, Silicon, Interferometry, Silicon films, Photomasks, Semiconducting wafers

Showing 5 of 9 publications
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