Dr. Frank Rohmund
Senior Director Global R&D at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Photomasks, Source mask optimization, Diffractive optical elements, Manufacturing, Lithographic illumination, Lithography, Semiconducting wafers, Photovoltaics, Polarization, Printing

PROCEEDINGS ARTICLE | June 16, 2004
Proc. SPIE. 5352, Ultrafast Phenomena in Semiconductors and Nanostructure Materials VIII
KEYWORDS: Carbon nanotubes, Polarization, Harmonic generation, Single walled carbon nanotubes, Pulsed laser operation, Third-harmonic generation, Monochromators, Signal generators, Scanning probe microscopy, Plasma

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