Dr. Frank Rohmund
Senior Director Global R&D at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Photovoltaics, Lithographic illumination, Diffractive optical elements, Polarization, Manufacturing, Printing, Photomasks, Source mask optimization, Semiconducting wafers

PROCEEDINGS ARTICLE | June 16, 2004
Proc. SPIE. 5352, Ultrafast Phenomena in Semiconductors and Nanostructure Materials VIII
KEYWORDS: Polarization, Third-harmonic generation, Scanning probe microscopy, Signal generators, Harmonic generation, Monochromators, Pulsed laser operation, Single walled carbon nanotubes, Plasma, Carbon nanotubes

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