Dr. Frank J. Ruess
at Univ of New South Wales
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Lithography, Optical lithography, Chemical species, Silicon, Hydrogen, Scanning probe microscopy, Phosphorus, Electron transport, Scanning tunneling microscopy, Quantum computing

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