Dr. Frank M. Schellenberg
Strategic Marketing Manager at
SPIE Involvement:
Conference Program Committee | Conference Chair | Conference Co-Chair | Editor | Author
Publications (34)

SPIE Conference Volume | March 17, 2009

SPIE Conference Volume | April 29, 2008

SPIE Conference Volume | March 13, 2007

PROCEEDINGS ARTICLE | June 21, 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Lithography, Plasmonics, Plasmons, Surface plasmons, Polarization, Chromium, Computer simulations, Photomasks, SRAF, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Phase shifting, Polymethylmethacrylate, Etching, Polymers, Photomasks, Directed self assembly, Picosecond phenomena, Photoresist processing, Phase shifts

SPIE Conference Volume | March 10, 2006

Showing 5 of 34 publications
Conference Committee Involvement (24)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VI
24 February 2014 | San Jose, California, United States
Showing 5 of 24 published special sections
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