Dr. Frank M. Schellenberg
Strategic Marketing Manager
SPIE Involvement:
Author
Publications (29)

Proceedings Article | 21 June 2006 Paper
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Lithography, Plasmonics, Plasmons, Surface plasmons, Polarization, Chromium, Computer simulations, Photomasks, SRAF, Resolution enhancement technologies

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Phase shifting, Polymethylmethacrylate, Etching, Polymers, Photomasks, Directed self assembly, Picosecond phenomena, Photoresist processing, Phase shifts

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Point spread functions, Data modeling, Visualization, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Process modeling, EUV optics

Proceedings Article | 27 January 2005 Paper
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Phase shifting, Polarization, Computer simulations, Design for manufacturing, Photomasks, Optical proximity correction, SRAF, Resolution enhancement technologies, Phase shifts

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Phase shifting, Optical lithography, Patents, Polarization, Photography, Photomasks, Optical proximity correction, Resolution enhancement technologies, Phase shifts

Showing 5 of 29 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 17 March 2009

SPIE Conference Volume | 29 April 2008

SPIE Conference Volume | 13 March 2007

SPIE Conference Volume | 10 March 2006

Conference Committee Involvement (24)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VI
24 February 2014 | San Jose, California, United States
Showing 5 of 24 Conference Committees
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