Dr. Frank Siewert
at Helmholtz-Zentrum Berlin
SPIE Involvement:
Editor | Author
Publications (34)

Proceedings Article | 9 June 2023 Presentation
Proceedings Volume PC12581, PC1258109 (2023) https://doi.org/10.1117/12.2666473
KEYWORDS: Optical components, Metrology, X-rays, X-ray optics, X-ray diffraction, X-ray characterization, Reflectivity, Manufacturing, Mirrors, Free electron lasers

Proceedings Article | 27 April 2023 Presentation + Paper
Philipp Hönicke, Yves Kayser, Victor Soltwisch, Andre Wählisch, Nils Wauschkuhn, Jeroen Scheerder, Claudia Fleischmann, Janusz Bogdanowicz, Anne-Laure Charley, Anabela Veloso, Roger Loo, Hans Mertens, Andriy Hikavyy, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Richard Ciesielski, Burkhard Beckhoff
Proceedings Volume 12496, 124961J (2023) https://doi.org/10.1117/12.2657963
KEYWORDS: Nanostructures, X-ray fluorescence spectroscopy, Metrology, Semiconductors, Fluorescence intensity, Data modeling, Transmission electron microscopy, Small targets

Proceedings Article | 13 December 2022 Paper
Proceedings Volume 12502, 1250206 (2022) https://doi.org/10.1117/12.2663447
KEYWORDS: Mirrors, Free electron lasers, Ultraviolet radiation, Optical simulations, Vacuum ultraviolet, X-rays, Monochromators, Diffraction gratings

Proceedings Article | 22 February 2021 Presentation
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch
Proceedings Volume 11611, 116110R (2021) https://doi.org/10.1117/12.2586082
KEYWORDS: Nanostructures, Metrology, Machine learning, X-rays, X-ray optics, X-ray fluorescence spectroscopy, Statistical analysis, Semiconducting wafers, Reflectivity, Nondestructive evaluation

Proceedings Article | 2 October 2019 Presentation + Paper
Proceedings Volume 11109, 1110905 (2019) https://doi.org/10.1117/12.2529519
KEYWORDS: Calibration, Mirrors, Autocollimators, Error analysis, X-ray optics, Precision calibration, X-rays, Profilometers, Metrology, Sensors

Showing 5 of 34 publications
Proceedings Volume Editor (1)

SPIE Conference Volume | 24 October 2023

Conference Committee Involvement (12)
X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation VII
7 April 2025 | Prague, Czech Republic
Advances in Metrology for X-Ray and EUV Optics X
23 August 2023 | San Diego, California, United States
X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation VI
27 April 2023 | Prague, Czech Republic
EUV and X-ray Optics, Sources, and Instrumentation
19 April 2021 | Online Only, Czech Republic
Advances in Metrology for X-Ray and EUV Optics IX
24 August 2020 | Online Only, California, United States
Showing 5 of 12 Conference Committees
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