High-precision laser micro machining gains more importance in industrial applications every month. Optical systems like the helical optics offer highest quality together with controllable and adjustable drilling geometry, thus as taper angle, aspect ratio and heat effected zone. The helical optics is based on a rotating Dove-prism which is mounted in a hollow shaft engine together with other optical elements like wedge prisms and plane plates. Although the achieved quality can be interpreted as extremely high the low process efficiency is a main reason that this manufacturing technology has only limited demand within the industrial market. The objective of the research studies presented in this paper is to dramatically increase process efficiency as well as process flexibility. During the last years, the average power of commercial ultra-short pulsed laser sources has increased significantly. The efficient utilization of the high average laser power in the field of material processing requires an effective distribution of the laser power onto the work piece. One approach to increase the efficiency is the application of beam splitting devices to enable parallel processing. Multi beam processing is used to parallelize the fabrication of periodic structures as most application only require a partial amount of the emitted ultra-short pulsed laser power. In order to achieve highest flexibility while using multi beam processing the single beams are diverted and re-guided in a way that enables the opportunity to process with each partial beam on locally apart probes or semimanufactures.
High-precision micro laser drilling with high aspect ratios requires laser imaging effects such as optical double rotation. Optical double rotation is an effect where the laser beam is guided through any optical elements with a total amount of reflections that remains uneven. Those optical elements need to be mounted in a rotary stage that spins the elements with a certain velocity. In an ideal case the optical axis is identically with the rotational axis. Few optical elements such as the Dove-prism show the effect that the beam is rotated in itself while it is moving on a helical path. That offers an independency of the beam profile. However the Dove-prism alone can not be adjusted in a way that the two axis match. This is based on geometrical errors of the Dove-prism due to manufacturing technologies. Certain deviation in length and angle lead to a helical error. Additional optical elements can compensate this effect. Alignment that only takes place in one 2D plane (e.g. the focal plane) leads most likely to a cross-over of both axes (x-alignment) in that one plane. In order to match both axes the alignment needs to be done at least in two 2D planes. That requires the opportunity to both influence the optical angle and the optical position (parallel shift) in both planes. The highly complex optical alignment method as well as the mechanical storage of the optical elements will be shown in this paper.