Dr. Frans G. C. Bijnen Profile

Dr. Frans G. C. Bijnen

at ASML Netherlands BV

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Author

Publications (6)

Proceedings Article | 22 February 2021 Presentation + Paper

Qualification of small alignment mark by on-product overlay performance

Jigang Ma, Frans Bijnen, Edo Hulsebos, Lukasz Macht, Sotirios Tsiachris, Jin Dai, Rob van der Meulen, Miao Yu, Paul Böcker, Jung-Hwan Kim, Hyun Kim, Gwang-Gon Kim, Joon-Seuk Lee, Eung-Ryong Oh, Hong-Bok Yeon, Young-Deuk Kim, Seung-Uk Jeong, Sang-Ho Lee, Chan-Ha Park

Proceedings Volume 11613, 116130J (2021) https://doi.org/10.1117/12.2584618

KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Algorithm development, Semiconductor manufacturing, Scanners, Process control, Device simulation

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Proceedings Article | 30 December 2004 Paper

3D Align overlay verification using glass wafers

Eric Smeets, Frans Bijnen, John Slabbekoorn, Henk van Zeijl

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.573807

KEYWORDS: Glasses, Semiconducting wafers, Overlay metrology, Optical alignment, Silicon, 3D metrology, Lithography, Reflectivity, Microelectromechanical systems, Phase modulation

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Proceedings Article | 16 August 2004 Paper

Characterization of waferstepper and process-related front- to backwafer overlay errors in bulk micromachining using electrical overlay test structures

Henk van Zeijl, Frans Bijnen, John Slabbekoorn

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545900

KEYWORDS: Semiconducting wafers, Resistors, Overlay metrology, Optical alignment, Etching, Calibration, Resistance, Wafer-level optics, Bulk micromachining, Tin

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Proceedings Article | 16 June 2003 Paper

Front-to-back alignment metrology

Frans Bijnen, Willy van Buel, Cheng Gui, Joeri Lof

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.487585

KEYWORDS: Semiconducting wafers, Optical alignment, Calibration, Wafer-level optics, Metrology, Bismuth, Reticles, Overlay metrology, Lithography, Chemical mechanical planarization

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Proceedings Article | 1 July 2002 Paper

Extended front-to-back alignment capability for MEMS/MOEMS applications

Cheng-Qun Gui, Willy van Buel, Frans Bijnen, Joeri Lof

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472359

KEYWORDS: Optical alignment, Semiconducting wafers, Data transmission, Calibration, Wafer-level optics, Optical design, Sensors, Imaging systems, Optical lithography, Lithography

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Proceedings Article | 8 March 1995 Paper

Laser-photoacoustical detection of trace gases applied to respiration of arthropods

Frans Bijnen, J. Hackstein, P. Kestler, Frans Harren, J. Reuss

Proceedings Volume 2461, (1995) https://doi.org/10.1117/12.203527

KEYWORDS: Carbon dioxide, Gases, Resonators, Methane, Nitrogen, Photoacoustic spectroscopy, Absorption, Liquids, Gas lasers, Diffusion

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Showing 5 of 6 publications

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