Franz X. Hutter
at Institut für Mikroelektronik Stuttgart
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 May 2015
Proc. SPIE. 9502, Metamaterials X
KEYWORDS: Aluminum, Metals, Silicon, Silica, Etching, Plasmonics, Cameras, Semiconducting wafers, Dielectrics, Optical filters

Proceedings Article | 26 April 2008
Proc. SPIE. 7003, Optical Sensors 2008
KEYWORDS: Thermography, Temperature metrology, Cameras, Pyrometry, Optical filters, Sensors, Imaging systems, Silicon, CMOS technology, Visualization

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