Dr. Franz Schaefers
Scientist at Helmholtz-Zentrum Berlin
SPIE Involvement:
Author
Publications (20)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Carbon, Metrology, X-rays, X-ray optics, Optical components, Contamination, Reflectometry, Synchrotron radiation, Scanning tunneling microscopy, Reflectivity

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Reflectometry, Mirrors, Sensors, Polarization, Extreme ultraviolet, Monochromators, Metrology, Optical components, LabVIEW, Reflectivity

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V
KEYWORDS: Mirrors, Reflectometry, Monochromators, Metrology, Sensors, Extreme ultraviolet, Diffraction gratings, Reflectivity, Optical components, Collimation

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8504, X-Ray Free-Electron Lasers: Beam Diagnostics, Beamline Instrumentation, and Applications
KEYWORDS: Monochromators, Crystals, Free electron lasers, Spectroscopy, X-rays, Laser crystals, Prototyping, X-ray lasers, Diodes, Synchrotrons

PROCEEDINGS ARTICLE | September 23, 2011
Proc. SPIE. 8141, Advances in Computational Methods for X-Ray Optics II
KEYWORDS: Spectrometers, Zone plates, Crystals, Monochromators, Silicon, Diagnostics, Ray tracing, Free electron lasers, Sensors, X-rays

PROCEEDINGS ARTICLE | September 14, 2005
Proc. SPIE. 5919, Soft X-Ray Lasers and Applications VI
KEYWORDS: Carbon, X-rays, Mirrors, Reflectivity, Multilayers, X-ray imaging, Cobalt, X-ray optics, Microscopy, X-ray microscopy

Showing 5 of 20 publications
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