François Martin
at CEA-LETI
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 February 2020 Presentation + Paper
Proceedings Volume 11280, 112801C (2020) https://doi.org/10.1117/12.2544787
KEYWORDS: Aluminum, Atomic layer deposition, Sulfur, Indium gallium nitride, Indium, Light emitting diodes, Gallium, Chemical analysis, Oxygen, Quantitative analysis

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