Prof. Fred Bijkerk
Dept Head at MESA+ Institute for Nanotechnology
SPIE Involvement:
Conference Program Committee | Author
Publications (49)

PROCEEDINGS ARTICLE | October 26, 2017
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: X-ray optics, X-rays, Adaptive optics, Geometrical optics, Alternate lighting of surfaces

PROCEEDINGS ARTICLE | August 26, 2015
Proc. SPIE. 9588, Advances in X-Ray/EUV Optics and Components X
KEYWORDS: Mirrors, X-ray optics, Optical lithography, X-rays, Interfaces, Nitrogen, Reflectivity, Extreme ultraviolet, Local area networks, Lanthanum

PROCEEDINGS ARTICLE | May 12, 2015
Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV
KEYWORDS: Mirrors, Multilayers, Data modeling, Annealing, X-rays, Interfaces, Reflectivity, Reconstruction algorithms, Algorithm development, Grazing incidence

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Diffraction, Multilayers, Reflection, Imaging systems, Ultraviolet radiation, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma

SPIE Journal Paper | March 17, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Multilayers, Annealing, Reflectivity, Lanthanum, Interfaces, Crystals, Temperature metrology, Local area networks, X-ray diffraction, X-rays

PROCEEDINGS ARTICLE | September 27, 2013
Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII
KEYWORDS: Diffraction, Optical filters, Antireflective coatings, Multilayers, Reflection, Ultraviolet radiation, Silicon, Reflectivity, Extreme ultraviolet, Diffraction gratings

Showing 5 of 49 publications
Conference Committee Involvement (12)
Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam7)
1 April 2019 | Prague, Czech Republic
Damage to VUV, EUV, and X-ray Optics (XDam6)
24 April 2017 | Prague, Czech Republic
Damage to VUV, EUV, and X-ray Optics V (XDam5)
15 April 2015 | Prague, Czech Republic
Damage to VUV, EUV, and X-ray Optics IV
15 April 2013 | Prague, Czech Republic
Advances in X-ray Free-Electron Lasers: Radiation Schemes, X-ray Optics and Instrumentation
20 April 2011 | Prague, Czech Republic
Showing 5 of 12 published special sections
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