Prof. Fred Lewis Terry
at Univ of Michigan
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Publications (10)

SPIE Journal Paper | November 1, 2011
OE Vol. 50 Issue 11
KEYWORDS: Reflectivity, Surface roughness, Metals, Polishing, Gold, Near infrared, Mirrors, Profilometers, Scattering, Light scattering

SPIE Journal Paper | December 1, 2010
OE Vol. 49 Issue 12
KEYWORDS: Metals, Scattering, Defect detection, Inspection, Light scattering, Sensors, Laser scattering, Manufacturing, GRIN lenses, Surface finishing

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7195, Fiber Lasers VI: Technology, Systems, and Applications
KEYWORDS: Fiber amplifiers, Mid-IR, Optical amplifiers, Modulation, Single mode fibers, Semiconductor lasers, Laser ablation, Diodes, ZBLAN, Absorption

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Refractive index, Data modeling, Water, Computer simulations, Photoresist materials, Scatterometry, Reflectometry, Spectroscopic ellipsometry, Reflectance spectroscopy, Photoresist developing

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Refractive index, Data modeling, Scattering, In situ metrology, Silicon, Scanning electron microscopy, Photoresist materials, Scatterometry, Spectroscopic ellipsometry, Diffraction gratings

PROCEEDINGS ARTICLE | September 23, 2002
Proc. SPIE. 4817, Diode Lasers and Applications in Atmospheric Sensing
KEYWORDS: Modulation, Sensors, Etching, Semiconductor lasers, Plasma etching, Chlorine, Semiconducting wafers, Anisotropic etching, Plasma, Absorption

Showing 5 of 10 publications
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