Prof. Fred van Keulen
at Technische Univ Delft
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | April 21, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Beam splitters, Metrology, Silica, Lenses, Sensors, Microscopy, Inspection, Image resolution, Semiconductor lasers, Radiative energy transfer, Near field scanning optical microscopy, Near field, Distance measurement, Scanning probe microscopy, Heat flux, Neodymium, Scanning probe microscopes, Hyperlenses, Temperature metrology, Near field optics, Scanning probe metrology

PROCEEDINGS ARTICLE | April 10, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Semiconductors, Oscillators, Nanoimaging, Stereoscopy, Silicon, Inspection, Atomic force microscopy, Motion models, 3D image processing

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Optical lithography, 3D acquisition, Error analysis, Photoresist materials, Digital micromirror devices, Photoresist developing, Standards development, 3D microstructuring, Grayscale lithography

PROCEEDINGS ARTICLE | March 6, 2013
Proc. SPIE. 8627, Integrated Optics: Devices, Materials, and Technologies XVII
KEYWORDS: Refractive index, Waveguides, Etching, Computer simulations, Wave propagation, Brain-machine interfaces, Optimization (mathematics), Integrated photonics, Multimode interference devices, Instrument modeling

PROCEEDINGS ARTICLE | February 21, 2013
Proc. SPIE. 8632, Photonic and Phononic Properties of Engineered Nanostructures III
KEYWORDS: Waveguides, Dispersion, Crystals, Dielectrics, Photonic crystals, Distortion, Computer simulations, Optimization (mathematics), Radio propagation, Neptunium

PROCEEDINGS ARTICLE | April 18, 2008
Proc. SPIE. 6928, Active and Passive Smart Structures and Integrated Systems 2008
KEYWORDS: Actuators, Resonators, Photography, Numerical modeling, Mechanical engineering, Aerodynamics, Electromagnetism, Prototyping, Model-based design, Micro unmanned aerial vehicles

Showing 5 of 9 publications
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