Frederic Robert
Chief Technical Officer at ASELTA Nanographics
SPIE Involvement:
Area of Expertise:
Photo Lithography , OPC , Mask , Metrology , MPC
Publications (35)

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960S (2023)
KEYWORDS: Contour extraction, Metrology, Scanning electron microscopy, Image processing, Optical proximity correction, Calibration, Multilayers, Modeling, Overlay metrology, High volume manufacturing, Edge roughness

Proceedings Article | 27 April 2023 Presentation + Paper
Alexandre Moly, Nivea Schuch, Frederic Robert, Thiago Figueiro, Jessy Bustos, Loïc Perraud, Jonathan Pradelles, Elie Sezestre
Proceedings Volume 12496, 124961D (2023)
KEYWORDS: Contour extraction, Scanning electron microscopy, Neural networks, Image processing, Calibration, Deep learning, Image denoising, Image acquisition, Machine learning

Proceedings Article | 27 April 2023 Presentation + Paper
Jonathan Pradelles, Loïc Perraud, Elie Sezestre, Aurélien Fay, Nivea Schuch, Thiago Figueiro, Frédéric Robert
Proceedings Volume 12496, 124960U (2023)
KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Contour extraction, Contour modeling, Critical dimension metrology, Data modeling, Measurement uncertainty, Image processing

Proceedings Article | 14 June 2022 Poster + Paper
Proceedings Volume PC12053, PC120530Q (2022)
KEYWORDS: SRAF, Printing, Scanning electron microscopy, Calibration, Data modeling, Computer simulations, Artificial intelligence, Optical proximity correction, Image analysis, Stochastic processes

Proceedings Article | 14 June 2022 Poster + Paper
Bertrand Le Gratiet, Régis Bouyssou, Julien Ducoté, Florent Dettoni, Thibaut Bourguignon, Vincent Morin, Romain Bange, Nivea Schuch, Julien Nicoulaud, Guillaume Renault, Frederic Robert, Thiago Figueiro
Proceedings Volume PC12053, PC120530S (2022)
KEYWORDS: Metrology, Semiconducting wafers, Data integration, Visualization, Time metrology, Scanning electron microscopy, Manufacturing, Image quality, Image processing software, Image processing

Showing 5 of 35 publications
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