Dr. Frederick H. Dill
at HGST
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical lithography, Image processing, Silicon, Photoresist materials, Transistors, Photoresist developing, Process modeling, Picture Archiving and Communication System, Absorption

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