Prof. Frederik S. G. Ceyssens
at KU Leuven
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Coating, Photoresist materials, Semiconducting wafers, Micromachining, Etching, Photoresist processing, Metals, Electroplating, Chromium, Standards development

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Actuators, Position sensors, Sensors, Microfluidics, Microactuators, Control systems, Inductance, Aluminum, Copper, Transformers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top