Friedel Koerfer
at Fraunhofer-Institut für Produktionstechnologie IPT
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 17 June 2009
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Confocal microscopy, Microscopes, Interferometers, Sensors, Calibration, Manufacturing, Inspection, Interferometry, Environmental sensing, Standards development

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Optical components, Microscopes, Light sources, Sensors, Calibration, Wavefronts, Ray tracing, Virtual reality, Environmental sensing, Device simulation

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