Dr. Friedrich Koenig
Sr Research and Development Manager at Merck KGaA
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 25, 2004
Proc. SPIE. 5250, Advances in Optical Thin Films
KEYWORDS: Refractive index, Ions, Coating, Oxygen, Deposition processes, Niobium, Prototyping, Resolution enhancement technologies, Plasma, Absorption

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