IMECAS is developing a silicon photonics process platform based on existing 22nm CMOS platform. Developing this platform requires continuous process optimization and design verification, so the wafer-level test solution presented in this paper plays an extremely important role in process validation and optimization. We design a test station which enables manual and semi-automatic for optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, grating couplers, splitter, photo-detectors, modulators etc. It is compatible with 200mm wafer-level testing and Die-level testing. Meanwhile, it has two coupling ways: horizontal coupling and vertical coupling. The measured repeatability of S-parameters and IV is within 6α.