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Fumiaki Endo
at Hitachi High-Tech Corp
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Publications (2)
Proceedings Article | 18 March 2016 Paper
Novel detection and process improvement for organic coating-film defects
Masahiko Harumoto, Yuji Tanaka, Akihiro Hisai, Masaya Asai, Hideo Ota, Fumiaki Endo, Kazuo Takahashi
Proceedings Volume 9776, 97761X (2016) https://doi.org/10.1117/12.2218981
KEYWORDS: Coating, Defect detection, Photoresist materials, Extreme ultraviolet, Process control, Scanning electron microscopy, Particles
Proceedings Article | 12 April 2007 Paper
Developing the new ADC algorithm that enables to identify the defect source
Po-Yueh Tsai, Wen-Feng Chiu, To-Yu Chen, Fumiaki Endo, Yuko Kariya, Kazunori Nemoto
Proceedings Volume 6518, 65180P (2007) https://doi.org/10.1117/12.712069
KEYWORDS: Particles, Algorithm development, Yield improvement, Back end of line, Image classification, Manufacturing, System on a chip, Scanning electron microscopy, Chemical vapor deposition, Semiconductor manufacturing
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