We proposed a fabrication method of a sub-micron gap liquid chromatography micro chip by Silicon micromachining
technology and performed a principle confirmation using this chip. This paper shows the fabrication process of the
sub-micron gap in the flow channel which is made by the micro-pillar array formation by Silicon micromachining
technology, and the deposition of poly-Si and successive thermal oxidation. It has become possible to fabricate the
sub-micron order gap and control the gaps by the proposed method. Next, we deposited the ODS (octadecylsily) in the
flow channel. Finally, using this chip, we performed the principle confirmation experiment of ODS deposition effect by
injecting lysozyme into the flow channel. As the result, it was confirmed that the proposed method has the possibility of
the separation analysis of biological samples.
In this study, we proposed a new sensing method using a special SPR chip on which microstructures are fabricated, and
performed a principle confirmation of the sensing feasibility using this chip. We examined a fabrication method of micro
structures on the SPR chip that has a filter effect by the pillar structure, which can filter the target substance reaching to
the detection area of SPR sensing. In order to confirm the filter effect of the micro structure on the SPR chip, we
performed the principle confirmation experiment of the SPR sensing system using the fine particles. Next, in order to
adapt to the biological molecules measurement, we performed the experiment using yeast cells and demonstrated the
filter effect of this chip with the micro structure.
This paper describes a new fabrication process of a micro elliptical collimator lens to form a beam shape for LD(Laser Diode), and the evaluation results of the optical characteristic for this lens. Beam shape of LD is an ellipse because divergent light angle is different between horizontal and vertical direction, which increases a coupling loss with an optical fiber. In this presentation, we propose the lens to form the divergent light of an elliptical beam shape to the collimated light of a circular beam shape. This lens makes it possible to reduce the coupling loss with the optical fiber. For this purpose, we designed one lens, which has different curvature radiuses between incident and output surfaces. In the incident surface, the divergent light is formed to the convergent light, and in the output surface, the convergent light is formed to the collimated light. We simulated the optical characteristic of this lens, and designed for various parameters. In order to fabricate this lens, we propose a new process using a chemically absorbed monomolecular layer, which has an excellent hydrophobic property. This layer is patterned and deposited by a photolithographic technique. Next, we drop a UV(Ultra Violet) cure material on the hydrophilic area, as the result, we can fabricate a micro elliptical lens shape. The curvature radius of this lens can be controlled by the amount of a dropped UV cure material and an elliptical pattern size in horizontal and vertical direction. The formed lens shapes are transferred by the electro-plating and then the micro dies are fabricated. And they are used for molding the plastic lens.
Recently, there are a lot of studies on the micro motors using an electrostatic actuator as the driving force in the micro electro mechanical systems (MEMS) field. However, the electrostatic actuator has a problem concerning the precise actuation control. In the conventional researches, the rotary type electrostatic actuators have been reported, but the rotation angle has not been precisely controlled in the actuators. This paper describes a new micro motor by a rotary type scratch drive actuator (SDA) with a Poly-Si scale to measure the rotation angle based on the MEMS technology. In this study, we make it possible to measure the rotation angle of th rotary type SDA motor by a fiber type micro encoder. For this purpose,
we formed the Poly-Si scale around the outside of the micro SDA motor, and achieved a reflection type optical fiber micro encoder. In this presentation, we describe the fabrication process for this device and the evaluation results of the optical characteristic of the fiber type micro encoder.
This paper proposes a new method for detecting label-free T4-DNA molecules using a Surface Plasmon Resonance (SPR1,2) technique on a gold thin film. We used a solution that dissolved T4-DNA molecules in pure water, and examined the relation between DNA concentration change and SPR angle change in the solution. As the result, it was confirmed that the SPR angle change increased with the increase of the DNA concentration change. Therefore, it was feasible to detect the DNA concentration change using the SPR technique. Further, in order to examine to detect a single DNA molecule, we calculated the area that a single DNA molecule would occupy in SPR area, and we examined to focus the beam of the SPR device at the area. However, it is difficult to focus the diameter of the spot within 500um because ofn the size of a light source and the incident angle of the light. Therefore, we tried to fabricate the SPR chip in which SPR area is narrowed that has the same effect as focusing the beam. In order to narrow the SPR area, we decreased the area of gold thin film in this chip, and also, in order to reflect a light from only the area of gold thin film, the area without a gold thin film was micro-machined to make it unevenness for the reduction of a light reflection. By the above-mentioned method, we examined the possibility to detect the label-free DNA molecule using the SPR technique.
A variable optical attenuator (VOA) is a tunable device that can control the amount of the attenuation of the laser power in the optical communication systems. We proposed a new construction of the VOA composed of lenses and fibers and micro-actuators, which are very simple and easy to assemble. By the constructed devices, the good optical characteristics such as an insertion loss, a wavelength dependency and dynamic range are confirmed experimentally.
Currently, diagnosis of cancer is performed by biopsy, whereby medical doctors observe a removed specimen, focusing their attention on morphological changes in the cell sequence and cell nuclei. For early cancer, the only effect is a slight increase in the size of the cell nuclei in comparison with normal cells. Based on medical knowledge, it is presumed that an extremely small amount of a specific protein may be contained in a cell nucleus. We propose spectroscopy-tomography of single cell to measure slight changes in this protein. This technology is composed of two elemental technologies, high spatial resolution spectrometry and a precise single cell rotating method. We propose variable phase-contrast spectrometry as the high spatial resolution spectrometry and proximal two-beam optical tweezers as the precise rotating method. By these methods, we can obtain a 3-dimensional distribution of the cell components to a high spatial resolution. We verified the accuracy of variable phase-contrast spectrometry by measuring the height of a diffraction grating. We confirmed that a microsphere can be rotated by proximal two-beam optical tweezers.
We propose a novel optical ADM node construction which can add or drop a voluntary wavelength in network system. The node is composed of a disk filter that enables the transmission wavelength to be linearly tuned by rotating the disk substrate. When the collimated optical beam with multi-wavelengths transmits the disk filter, only the specific wavelength corresponding the disk filter position transmits, and then the wavelength can be dropped to the opposite fiber, and the rest of the wavelengths are reflected. When a voluntary wavelength corresponding to the disk filter position is added from the fiber of the opposite side, the add function can be achieved. As described above, the Add/Drop function of a voluntary wavelength can be easily realized by using this disk filter. The features of this novel ADM are described, and the optical reflection and transmission characteristics of a dielectric-multi-layer-film are simulated theoretically. The wavelength shift by the inclination of the disk surface is also discussed theoretically. The mechanical stability is examined and the high stability is confirmed. Finally, using this disk filter with collimated optical fibers, the optical Add/Drop performance is demonstrated and the data transmission characteristics for 2.5 Gbps is evaluated experimentally.