Fumiki Kato
at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 30 April 2009 Paper
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: X-rays, Mirrors, Silicon, X-ray optics, Microelectromechanical systems, X-ray technology, Nickel, Semiconducting wafers, Hydrogen, Wafer-level optics

Proceedings Article | 30 April 2009 Paper
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Polishing, X-rays, Mirrors, Magnetism, X-ray optics, Surface finishing, Reflection, Microelectromechanical systems, Nickel, Abrasives

Proceedings Article | 4 January 2006 Paper
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Polymethylmethacrylate, X-rays, Diffraction, Lithography, Synchrotron radiation, Fabrication, Diffraction gratings, Optical components, Submicron lithography, Tantalum

Proceedings Article | 4 January 2006 Paper
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Photomasks, X-rays, Near field diffraction, Diffraction, X-ray lithography, Lithography, Synchrotron radiation, X-ray diffraction, Scanning probe microscopy, Submicron lithography

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