Fumiki Kato
at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 30 April 2009
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Mirrors, X-ray optics, X-rays, Nickel, Silicon, Hydrogen, Semiconducting wafers, X-ray technology

Proceedings Article | 30 April 2009
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Microelectromechanical systems, Mirrors, X-ray optics, Polishing, Reflection, X-rays, Nickel, Magnetism, Abrasives, Surface finishing

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Fabrication, Optical components, Lithography, Diffraction, Polymethylmethacrylate, X-rays, Synchrotron radiation, Tantalum, Submicron lithography, Diffraction gratings

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Lithography, Diffraction, X-rays, X-ray diffraction, Near field diffraction, Photomasks, Scanning probe microscopy, Synchrotron radiation, X-ray lithography, Submicron lithography

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