Dr. Dongfeng Geng
at Luoyang Optoelectro Technology Development Ctr
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 20, 2014
Proc. SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications
KEYWORDS: Staring arrays, Readout integrated circuits, Particles, Indium, Silicon, Semiconducting wafers, Failure analysis, Array processing, Surface finishing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | November 20, 2014
Proc. SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications
KEYWORDS: Semiconductors, Infrared sensors, Capacitors, Sensors, Etching, Metals, Capacitance, Wet etching, Plasma etching, Anisotropic etching

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