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Gabriel Reynaud
at CEA-LETI
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Publications (1)
Proceedings Article | 19 March 2018 Presentation + Paper
Pillars fabrication by DSA lithography: material and process options
A. Gharbi, P. Pimenta-Barros, O. Saouaf, G. Reynaud, L. Pain, R. Tiron, C. Navarro, C. Nicolet, I. Cayrefourcq, M. Perego, F. Pérez-Murano, E. Amat, M. Fernández-Regúlez
Proceedings Volume 10586, 105860Q (2018) https://doi.org/10.1117/12.2297414
KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Directed self assembly, Annealing, Etching, Scanning electron microscopy, Dry etching, Silicon, Lithography, Plasma etching
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