The design of a Micro Surface Plasmon Resonance Sensor is proposed. The possibility of implementing the modified Kretschmann-Raether scheme on a chip is investigated. A moving waveguide is used to change the angle of incidence of the beam of light. The main advantages of this sensor are potentially low cost, simplicity of design and very high parallelization. It is possible to have large number of such sensors on one chip, each of them with distinct activated sensing surfaces. The modeling of the sensor, design optimization procedures, and fabrication are also discussed. Computer simulations are used to validate the design.
KEYWORDS: Electrodes, Sensors, Skin, Humidity, Capacitance, Dielectrics, Human-machine interfaces, Electric field sensors, 3D modeling, Temperature metrology
Sensitive skin is a highly desired device for biomechanical devices, wearable computing, human-computer interfaces, exoskeletons, and, most pertinent to this paper, for lower limb prosthetics. The measurement of shear stress is very important because shear effects are key factors in developing surface abrasions and pressure sores in paraplegics and users of prosthetic/orthotic devices. A single element of a sensitive skin is simulated and characterized in this paper. Conventional tactile sensors are designed for measurement of the normal stress only, which is inadequate for comprehensive assessment of surface contact conditions. The sensitive skin discussed here is a flexible array capable of sensing shear and normal forces, as well as humidity and temperature on each element.
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